Determination of displacement with a piezoelectric transducer using phase-shift algorithms

Cheng Chung Jaing*, Yi Lin Shie, Chien Jen Tang, Yeuh Yeong Liou, Chun Ming Chang, Chii Rong Yang

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

10 引文 斯高帕斯(Scopus)

摘要

This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman-Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm.

原文英語
頁(從 - 到)170-172
頁數3
期刊Optical Review
16
發行號2
DOIs
出版狀態已發佈 - 2009 3月

ASJC Scopus subject areas

  • 原子與分子物理與光學

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