Design and implementation of an electromagnetically damped positioner with flexure suspension

Kuan Lin Huang, Yuan Zhi Peng, Jim Wei Wu, Mei Yung Chen, Li Chen Fu

研究成果: 書貢獻/報告類型會議貢獻

6 引文 斯高帕斯(Scopus)

摘要

In this paper, a novel design, control and implementation of a three degree-of-freedom (DOF) compact positioner is presented with high resolution in tens of nanometer-scale precision positioning and millimeter-level long travel range. According to the serial flexure mechanism design, whose motion comes from the elastic deformation of the flexure and the force allocation of five pairs of electromagnetic coils and permanent magnets, the precision positioner enables both horizontal and vertical actuations resulting in x-, y-, and z-motions respectively. Next, in order to improve the transient response and to suppress the vibration of the flexure suspension mechanism, an eddy current damper (ECD) is applied as a passive and noncontact resistance to vibration. Moreover, a laser interferometer sensing system is implemented to improve the positioning resolution of the stage. To maintain stability and robustness of the precision system, a decentralized adaptive sliding mode controller (DASMC) was implemented to overcome the overall situations of unmodeled system dynamics and external noises. From the experimental results, satisfactory performance has been observed, which means that the designated objectives of this research have been successfully attained, namely, (1)long working range, (2)high positioning resolution and (3)compact design.

原文英語
主出版物標題2011 IEEE International Conference on Control Applications, CCA 2011
頁面1062-1067
頁數6
DOIs
出版狀態已發佈 - 2011 十一月 7
事件2011 20th IEEE International Conference on Control Applications, CCA 2011 - Denver, CO, 美国
持續時間: 2011 九月 282011 九月 30

出版系列

名字Proceedings of the IEEE International Conference on Control Applications

其他

其他2011 20th IEEE International Conference on Control Applications, CCA 2011
國家美国
城市Denver, CO
期間2011/09/282011/09/30

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Mathematics(all)

指紋 深入研究「Design and implementation of an electromagnetically damped positioner with flexure suspension」主題。共同形成了獨特的指紋。

引用此