Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning

Yuan Zhi Peng, Jun Wei Wu, Kuan Chia Huang, Jyun Jhih Chen, Mei-Yung Chen, Li Chen Fu

研究成果: 書貢獻/報告類型會議貢獻

7 引文 斯高帕斯(Scopus)

摘要

Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of a probe or a tip; however, conventional atomic force microscope system suffers from the limitation of small scanning range, due to the short travelling range of piezoelectric actuation. In this paper, we propose a large measurement- range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuations. While the piezoelectric positioner provides high speed scanning with nanometer resolution, the precision electromagnetic positioner is capable of 1 mm 2 large field positioning with 30 nm rms error. The overall design of the stage consists of 4 pairs of electromagnetic actuator, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial xyz piezoelectric positioner. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of samples. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties and external disturbances. Finally, preliminary experiments are presented, demonstrating feasibility of the proposed system.

原文英語
主出版物標題2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011
頁面5577-5582
頁數6
DOIs
出版狀態已發佈 - 2011 十二月 1
事件2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011 - Orlando, FL, 美国
持續時間: 2011 十二月 122011 十二月 15

出版系列

名字Proceedings of the IEEE Conference on Decision and Control
ISSN(列印)0191-2216

其他

其他2011 50th IEEE Conference on Decision and Control and European Control Conference, CDC-ECC 2011
國家美国
城市Orlando, FL
期間2011/12/122011/12/15

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modelling and Simulation
  • Control and Optimization

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