TY - GEN
T1 - Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism
AU - Chen, Mei Yung
AU - Huang, Hsuan Han
AU - Hung, Shao Kang
AU - Fu, Li Chen
PY - 2006
Y1 - 2006
N2 - In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.
AB - In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.
KW - Adaptive sliding-mode controller
KW - Micropositioner
KW - Parallel flexure mechanism
KW - Precision positioning
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M3 - Conference contribution
AN - SCOPUS:34047209322
SN - 1424402107
SN - 9781424402106
T3 - Proceedings of the American Control Conference
SP - 1098
EP - 1103
BT - Proceedings of the 2006 American Control Conference
T2 - 2006 American Control Conference
Y2 - 14 June 2006 through 16 June 2006
ER -