In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.
|主出版物標題||Proceedings of the 2006 American Control Conference|
|出版狀態||已發佈 - 2006 十二月 1|
|事件||2006 American Control Conference - Minneapolis, MN, 美国|
持續時間: 2006 六月 14 → 2006 六月 16
|其他||2006 American Control Conference|
|期間||2006/06/14 → 2006/06/16|
ASJC Scopus subject areas