Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism

Mei Yung Chen, Hsuan Han Huang, Shao Kang Hung, Li Chen Fu

研究成果: 書貢獻/報告類型會議貢獻

4 引文 斯高帕斯(Scopus)

摘要

In this paper, a novel, compact and three degree-of-freedoms (DOFs) micropositioner with large travel ranges is presented. The design of the micropositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and uses the optical sensors to achieve the object of 3-DOF precise motion. An adaptive sliding-mode controller is proposed to let the system is more robust and stable in positioning. The developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.

原文英語
主出版物標題Proceedings of the 2006 American Control Conference
頁面1098-1103
頁數6
2006
出版狀態已發佈 - 2006 十二月 1
事件2006 American Control Conference - Minneapolis, MN, 美国
持續時間: 2006 六月 142006 六月 16

其他

其他2006 American Control Conference
國家美国
城市Minneapolis, MN
期間06/6/1406/6/16

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • 引用此

    Chen, M. Y., Huang, H. H., Hung, S. K., & Fu, L. C. (2006). Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism. 於 Proceedings of the 2006 American Control Conference (卷 2006, 頁 1098-1103). [1656363]