Design and implementation of a large measurement-range AFM scanning system

Jim Wei Wu, Yuan Zhi Peng, Jyun Jhih Chen, Kuan Chia Huang, Mei Yung Chen, Li Chen Fu

研究成果: 書貢獻/報告類型會議貢獻

4 引文 斯高帕斯(Scopus)

摘要

Atomic force microscopy (AFM) opens a new window to the nano-world. It is a widely used tool in nano measurement techniques. However, a traditional AFM system suffers from the limitation of small scanning range, due to the short traveling range of piezoelectric positioners. In this paper, we propose a large measurement-range AFM scanning system which combines both fine positioners of piezoelectric and electromagnetic actuators. While the piezoelectric actuation positioner (PAP) provides high speed scanning with nanometer resolution in the z-axis, the precision electromagnetic positioner (PEP) is capable of 1 mm 2 large field positioning with 20 nm rms error in the xy axes. The overall design of the stage consists of 4 pairs of electromagnetic actuators, monolithic serial flexure guidance with compression springs, an eddy current damper, and a commercial z-axis PAP. Given that there are 1 DOF in PAP and 2 DOF in PEP, the scanning positioners can achieve a large field image scanning. Besides, a stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) is used to measure the amplitude of the probe. Moreover, an adaptive sliding mode controller based on the analytical modeling is used to overcome the unmodeled system uncertainties, coupling motion and external noises, including the scanning disturbances. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed system.

原文英語
主出版物標題2012 American Control Conference, ACC 2012
頁面895-900
頁數6
出版狀態已發佈 - 2012 十一月 26
事件2012 American Control Conference, ACC 2012 - Montreal, QC, 加拿大
持續時間: 2012 六月 272012 六月 29

出版系列

名字Proceedings of the American Control Conference
ISSN(列印)0743-1619

其他

其他2012 American Control Conference, ACC 2012
國家加拿大
城市Montreal, QC
期間12/6/2712/6/29

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • 引用此

    Wu, J. W., Peng, Y. Z., Chen, J. J., Huang, K. C., Chen, M. Y., & Fu, L. C. (2012). Design and implementation of a large measurement-range AFM scanning system. 於 2012 American Control Conference, ACC 2012 (頁 895-900). [6315621] (Proceedings of the American Control Conference).