Design and experiment of a novel precise Maglev positioning system

This paper presents the design and implementation of a high-precision magnetically levitated (Maglev) stage. First of all, important issues related to construction of the mechanism of the Maglev positioning system are addressed. Then, a prototype of a novel planar Maglev positioning system are designed and implemented. For that task, a complete analytical model, including full degrees of freedom, has been derived and analyzed. Then, an adaptive controller which deals with unknown parameters is proposed to control the carrier at the desired target point of each axis with full alignment. The positioning system, including sensor and driver subsystems, has actually been implemented. Based on the experimental results, satisfactory performance has been achieved. The experimental results can demonstrates the feasibility of the developed controller.