Design and experiment of a macro-micro planar maglev positioning system

Mei-Yung Chen*, Tzuo Bo Lin, Shao Kang Hung, Li Chen Fu


研究成果: 雜誌貢獻期刊論文同行評審

39 引文 斯高帕斯(Scopus)


In this paper, a new planar magnetic levitation (maglev) positioning system is proposed, which is capable of executing dual-axis planar motions purely involving magnetic forces. Functionally, such a mechanism behaves like a planar XY table with micrometer precision. Specifically, in this system, a new structure with an adaptive sliding-mode control (ASMC) algorithm is described, which aims to achieve the following three goals: 1) a large moving range (millimeter level); 2) precise positioning (micrometer level); and 3) fast response. The system consists of a moving carrier platform, six permanent magnets (PMs) attached to the carrier, and six electromagnets mounted on a fixed base. After exploring the characteristics of the magnetic forces between PMs and electromagnets, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior inherent in maglev systems, the proposed ASMC guarantees satisfactory performance of the maglev system. Experiments have successfully demonstrated the feasibility and effectiveness of the overall system.

頁(從 - 到)4128-4139
期刊IEEE Transactions on Industrial Electronics
出版狀態已發佈 - 2012 十一月

ASJC Scopus subject areas

  • 控制與系統工程
  • 電氣與電子工程


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