Design and control of phase-detection mode atomic force microscopy for cells precision contour reconstruction under different environments

Jim Wei Wu, Jyun Jhih Chen, Kuan Chia Huang, Chih Lieh Chen, Yi Ting Lin, Mei Yung Chen, Li Chen Fu

研究成果: 書貢獻/報告類型會議貢獻

1 引文 斯高帕斯(Scopus)

摘要

Atomic force microscope (AFM) is equipped with height recognition with nano and sub-nano meter scale, and it can accurately build three-dimensional (3D) imaging of samples with micro-structure. In this paper, we propose a homemade phase-detection mode atomic force microscopy (PM-AFM). In measuring system, here we use a compact CD/DVD pick-up-head to measure the cantilever deflection. In scanning system, we use piezoelectric stages as the planar scanner. For the sake of accurately obtaining the contour of tender cells, first we design an MIMO adaptive double integral sliding mode controller (ADISMC) in xy-plane to increase the positioning accuracy and provide precision cell size. Second, in z-axis we design an adaptive complementary sliding-mode controller (ACSMC) to improve the scanning accuracy and to overcome the inconvenience for user with traditional proportional-integration controller. Besides, we use phase feedback signal, which features with higher sensitivity and faster response. Finally, the extensive experimental results are used to validate the performance of the proposed controller, quantify the scanning image quality of standard grating and reconstruct cells topography.

原文英語
主出版物標題2013 American Control Conference, ACC 2013
頁面5488-5493
頁數6
出版狀態已發佈 - 2013
對外發佈Yes
事件2013 1st American Control Conference, ACC 2013 - Washington, DC, 美国
持續時間: 2013 六月 172013 六月 19

其他

其他2013 1st American Control Conference, ACC 2013
國家美国
城市Washington, DC
期間2013/06/172013/06/19

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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