Depth profiles and chemical bonding states of graded doping and ultra-thin HfLaO high-k dielectrics deposited on silicon substrate

Pi Chun Juan*, Chuan Hsi Liu, Min Jou, Yi Kuan Chen, Yu Wei Liu, Chih Wei Hsu, Yi Hsien Chou, Jun You Lin

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

指紋

深入研究「Depth profiles and chemical bonding states of graded doping and ultra-thin HfLaO high-k dielectrics deposited on silicon substrate」主題。共同形成了獨特的指紋。

INIS

Engineering

Material Science