Depth profiles and chemical bonding states of graded doping and ultra-thin HfLaO high-k dielectrics deposited on silicon substrate
Pi Chun Juan*, Chuan Hsi Liu, Min Jou, Yi Kuan Chen, Yu Wei Liu, Chih Wei Hsu, Yi Hsien Chou, Jun You Lin
*此作品的通信作者
研究成果: 書貢獻/報告類型 › 會議論文篇章