Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method

Chin-Guo Kuo, I. Chun Lin, Chia I. Chuang, Cheng Fu Yang, Hsuan Yu Yang, Chia Ching Wu

研究成果: 書貢獻/報告類型會議貢獻

2 引文 斯高帕斯(Scopus)

摘要

In this study, the micro-scale of In2O3, Ga2O3, and ZnO oxide powders (with mole ratio In2O3: Ga2O3: ZnO = 1:1:2, abbreviated as IGZO) were put into a nano-ground machine with the addition of 1 wt% KD1 dispersant for nano-scale IGZO particles’ dispersion. Then the 6 wt% IGZO particles were dispersed into Isopropyl Alcohol (IPA) to get the solution for SPM to prepare the IGZO thin films. 0.1 ml IGZO solution was sprayed on the 2 cm × 1 cm glass substrates and then the nano-scale IGZO solution was carried out for thermal treatment under different temperatures in a furnace in air. The annealing temperature was changed from 200°C to 700°C and the annealing time was 3 h. The effects of the annealing temperature on the surface and cross-session morphologies, X-ray diffraction pattern, optical transmission spectrum, carrier concentration, carrier mobility, and resistivity of the IGZO thin films on glass substrates were studied. The measured results showed that the annealing temperature had large effect on the characteristics of the IGZO thin films.

原文英語
主出版物標題Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
編輯Artde Donald Kin-Tak Lam, Stephen D. Prior, Teen-Hang Meen
發行者CRC Press/Balkema
頁面11-14
頁數4
ISBN(列印)9781138027527
出版狀態已發佈 - 2015 一月 1
事件3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 - Guiyang, Guizhou, 中国
持續時間: 2014 十月 172014 十月 22

出版系列

名字Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014

其他

其他3rd International Conference on Innovation, Communication and Engineering, ICICE 2014
國家中国
城市Guiyang, Guizhou
期間14/10/1714/10/22

    指紋

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Information Systems

引用此

Kuo, C-G., Lin, I. C., Chuang, C. I., Yang, C. F., Yang, H. Y., & Wu, C. C. (2015). Deposition of ZnO-In2O3-Ga2O3 (IGZO) thin films by using spray coating method. 於 A. D. K-T. Lam, S. D. Prior, & T-H. Meen (編輯), Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014 (頁 11-14). (Innovation in Design, Communication and Engineering - Proceedings of the 3rd International Conference on Innovation, Communication and Engineering, ICICE 2014). CRC Press/Balkema.