Correlation between ferroelectricity and nitrogen incorporation of undoped hafnium dioxide thin films

Jun Dao Luo^*, Yun Tien Yeh, Yu Ying Lai, Chia Feng Wu, Hao Tung Chung, Yi Shao Li, Kai Chi Chuang, Wei Shuo Li, Pin Guang Chen, Min Hung Lee, Huang Chung Cheng

^*此作品的通信作者