@inproceedings{7b9368c8716c40dfa188de03cd0e0b82,
title = "Correlation between Access Polarization and High Endurance (\textasciitilde{} 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2",
abstract = "Endurance \textasciitilde{} 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE \textasciitilde{} 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.",
keywords = "Antiferroelectric, Endurance, Ferroelectric, HfZrO2",
author = "Hsiang, \{K. Y.\} and Liao, \{C. Y.\} and Lin, \{Y. Y.\} and Lou, \{Z. F.\} and Lin, \{C. Y.\} and Lee, \{J. Y.\} and Chang, \{F. S.\} and Li, \{Z. X.\} and Tseng, \{H. C.\} and Wang, \{C. C.\} and Ray, \{W. C.\} and Hou, \{T. H.\} and Chen, \{T. C.\} and Chang, \{C. S.\} and Lee, \{M. H.\}",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Reliability Physics Symposium, IRPS 2022 ; Conference date: 27-03-2022 Through 31-03-2022",
year = "2022",
doi = "10.1109/IRPS48227.2022.9764533",
language = "English",
series = "IEEE International Reliability Physics Symposium Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "P91--P94",
booktitle = "2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings",
}