@inproceedings{7b9368c8716c40dfa188de03cd0e0b82,
title = "Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2",
abstract = "Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.",
keywords = "Antiferroelectric, Endurance, Ferroelectric, HfZrO2",
author = "Hsiang, {K. Y.} and Liao, {C. Y.} and Lin, {Y. Y.} and Lou, {Z. F.} and Lin, {C. Y.} and Lee, {J. Y.} and Chang, {F. S.} and Li, {Z. X.} and Tseng, {H. C.} and Wang, {C. C.} and Ray, {W. C.} and Hou, {T. H.} and Chen, {T. C.} and Chang, {C. S.} and Lee, {M. H.}",
note = "Funding Information: The authors are grateful for the funding support from the Ministry of Science and Technology (MOST) under Grants 110-2218-E-A49-014-MBK, 110-2218-E-003-005, 110-2622-8-002-014. Process supported by Taiwan Semiconductor Research Institute (TSRI) & Nano Facility Center (NFC), Taiwan. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Reliability Physics Symposium, IRPS 2022 ; Conference date: 27-03-2022 Through 31-03-2022",
year = "2022",
doi = "10.1109/IRPS48227.2022.9764533",
language = "English",
series = "IEEE International Reliability Physics Symposium Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "P91--P94",
booktitle = "2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings",
}