Correlation between Access Polarization and High Endurance (~ 1012cycling) of Ferroelectric and Anti-Ferroelectric HfZrO2

K. Y. Hsiang, C. Y. Liao, Y. Y. Lin, Z. F. Lou, C. Y. Lin, J. Y. Lee, F. S. Chang, Z. X. Li, H. C. Tseng, C. C. Wang, W. C. Ray, T. H. Hou, T. C. Chen, C. S. Chang, M. H. Lee

研究成果: 書貢獻/報告類型會議論文篇章

6 引文 斯高帕斯(Scopus)

摘要

Endurance ~ 1012 cycling of ferroelectric (FE) and antiferroelectric (AFE) HfZrO2 (HZO) capacitors are achieved experimentally by adjusting the programming pulse width (tp). The correlation between switching polarization (△P) and fatigue behavior of high endurance is discussed. For long tp (= 1 μs), AFE exhibits excellent endurance with > 1010 cycles as compared with FE ~ 109 cycles. With shortening tP, the endurances of FE and AFE are significantly improved. There is no significant degradation until > 1011 cycling is observed for FE with tp=20ns.

原文英語
主出版物標題2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁面P91-P94
ISBN(電子)9781665479509
DOIs
出版狀態已發佈 - 2022
事件2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Dallas, 美国
持續時間: 2022 3月 272022 3月 31

出版系列

名字IEEE International Reliability Physics Symposium Proceedings
2022-March
ISSN(列印)1541-7026

會議

會議2022 IEEE International Reliability Physics Symposium, IRPS 2022
國家/地區美国
城市Dallas
期間2022/03/272022/03/31

ASJC Scopus subject areas

  • 一般工程

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