Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

J. C. Chiou*, Y. C. Lin, S. D. Wu

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

11 引文 斯高帕斯(Scopus)

摘要

The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.

原文英語
主出版物標題2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
發行者Institute of Electrical and Electronics Engineers Inc.
頁面85-86
頁數2
ISBN(電子)0780375955, 9780780375956
DOIs
出版狀態已發佈 - 2002
對外發佈
事件IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, 瑞士
持續時間: 2002 8月 202002 8月 23

出版系列

名字2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

會議

會議IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
國家/地區瑞士
城市Lugano
期間2002/08/202002/08/23

ASJC Scopus subject areas

  • 硬體和架構
  • 控制與系統工程
  • 電氣與電子工程
  • 電子、光磁材料

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