Charge transport in amorphous Hf0.5Zr0.5O2

D. R. Islamov; T. V. Perevalov; V. A. Gritsenko; C. H. Cheng; A. Chin

doi:10.1063/1.4914900

Charge transport in amorphous Hf_0.5Zr_0.5O₂

D. R. Islamov, T. V. Perevalov, V. A. Gritsenko, C. H. Cheng, A. Chin

機電工程學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

32 引文斯高帕斯（Scopus）

摘要

In this study, we demonstrated experimentally and theoretically that the charge transport mechanism in amorphous Hf_0.5Zr_0.5O₂ is phonon-assisted tunneling between traps like in HfO₂ and ZrO₂. The thermal trap energy of 1.25 eV and optical trap energy of 2.5 eV in Hf_0.5Zr_0.5O₂ were determined based on comparison of experimental data on transport with different theories of charge transfer in dielectrics. A hypothesis that oxygen vacancies are responsible for the charge transport in Hf_0.5Zr_0.5O₂ was discussed.

原文	英語
文章編號	102906
期刊	Applied Physics Letters
卷	106
發行號	10
DOIs	https://doi.org/10.1063/1.4914900
出版狀態	已發佈 - 2015 3月 9

ASJC Scopus subject areas

物理與天文學（雜項）

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10.1063/1.4914900

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AU - Islamov, D. R.

AU - Perevalov, T. V.

AU - Gritsenko, V. A.

AU - Cheng, C. H.

AU - Chin, A.

PY - 2015/3/9

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N2 - In this study, we demonstrated experimentally and theoretically that the charge transport mechanism in amorphous Hf0.5Zr0.5O2 is phonon-assisted tunneling between traps like in HfO2 and ZrO2. The thermal trap energy of 1.25 eV and optical trap energy of 2.5 eV in Hf0.5Zr0.5O2 were determined based on comparison of experimental data on transport with different theories of charge transfer in dielectrics. A hypothesis that oxygen vacancies are responsible for the charge transport in Hf0.5Zr0.5O2 was discussed.

AB - In this study, we demonstrated experimentally and theoretically that the charge transport mechanism in amorphous Hf0.5Zr0.5O2 is phonon-assisted tunneling between traps like in HfO2 and ZrO2. The thermal trap energy of 1.25 eV and optical trap energy of 2.5 eV in Hf0.5Zr0.5O2 were determined based on comparison of experimental data on transport with different theories of charge transfer in dielectrics. A hypothesis that oxygen vacancies are responsible for the charge transport in Hf0.5Zr0.5O2 was discussed.

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Charge transport in amorphous Hf0.5Zr0.5O2

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Charge transport in amorphous Hf_0.5Zr_0.5O₂