Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction

Y. S. Lin, C. Y. Kuo, W. C. Tian, T. H. Wu, H. J. Sheen, H. Y. Kuo, Chia-Jung Lu

研究成果: 書貢獻/報告類型會議貢獻

5 引文 斯高帕斯(Scopus)

摘要

A batch fabrication with simple micromachined process based on one photomask and the microfluidic laminar flow patterning technique is developed for a novel micropreconcentrator (μPCT) used in a micro gas chromatograph (μGC). Silver deposition using Tollens' reactions in microfludic channels provides a higher deposition rate and easier microfabrication compared to conventional micromachined technologies for thick metal microstructures (> 200 μm). An amorphous and porous carbon film that functions as an adsorbent is grown on microheaters inside the microchannel. The μPCT can be heated to >300°C rapidly by applying a constant electrical power of 5 W with a heating rate of 60°C/s. Four volatile organic compounds (VOCs), acetone, benzene, toluene, and xylene, are collected through the proposed novel μPCTs and separated successfully using a 17-m-long gas chromatography (GC) column. Compared with our previous work, the more uniform temperature distribution, more efficient heating rate and smaller peak widths at half height (PWHH) are obtained.

原文英語
主出版物標題2013 Transducers and Eurosensors XXVII
主出版物子標題The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
頁面2025-2028
頁數4
DOIs
出版狀態已發佈 - 2013 十二月 1
事件2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, 西班牙
持續時間: 2013 六月 162013 六月 20

出版系列

名字2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

其他

其他2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
國家西班牙
城市Barcelona
期間13/6/1613/6/20

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Lin, Y. S., Kuo, C. Y., Tian, W. C., Wu, T. H., Sheen, H. J., Kuo, H. Y., & Lu, C-J. (2013). Batch fabrication of micro preconcentrator with thin film microheater using Tollen's reaction. 於 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (頁 2025-2028). [6627195] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627195