Automatic LCD electro-optical characteristics measurement system based on generalized spectroscopic ellipsometry

Gao-Wei Chang*, Yu Hsuan Lin

*此作品的通信作者

研究成果: 雜誌貢獻會議論文同行評審

摘要

Liquid crystal displays (LCDs) or thin-film transistor (TFT) LCDs have been regarded as a promising technology in flat panel displays (FPDs). To meet the demands of the mass production and quality control, the development of automatic electro-optical characteristics measurement systems for LCDs is very important. To achieve this, we propose a generalized spectroscopic ellipsometry (GSE) based technique to measure the characteristics of LCDs. Our approach involves two primary steps. First, we review a theoretical basis for generalized spectroscopic ellipsometries for the LCD measurement. Those are mainly categorized into two classes of ellipsometries: the transmission variable angle spectroscopic ellipsometry (VASE) and the spectroscopic ellipsometry (SE) using a photoelastic modulator (PEM), called PEM SE. Second, on the basis of the VASE and PEM SE, we present a GSE-based system to measure the electro-optical characteristics for twisted nematic liquid crystals (TNLCs) and super twisted nematic liquid crystals (STNLCs). In this paper, the simulation results indicate the feasibility of this technique. Finally, the automatic GSE-based system is presented for measuring the LCD electro-optical characteristics.

原文英語
文章編號58750W
頁(從 - 到)1-9
頁數9
期刊Proceedings of SPIE - The International Society for Optical Engineering
5875
DOIs
出版狀態已發佈 - 2005
事件Novel Optical Systems Design and Optimization VIII - San Diego, CA, 美国
持續時間: 2005 七月 312005 八月 1

ASJC Scopus subject areas

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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