@inproceedings{9d099988af9e42e682c8b33589fb6004,
title = "Applying Grayscale Digital Masks and Defocusing Method to Digital Light Processing Stereolithography for Rapid Manufacture of Microlens Arrays",
abstract = "Grayscale digital masks and defocusing method were applied to digital light processing (DLP) stereolithography (SLA) 3D printing for the fabrication of various types of microlens arrays (MLAs) within 1 second. MLAs with high numerical aperture (NA) up to 0.98, MLAs with multiple focal lengths (21 ~ 199 μm) on a single substrate, MLAs with high fill factor of 77.98%, and aspherical MLAs were successfully demonstrated. Experiment results also clearly demonstrated that defocusing method efficiently reduced the surface roughness (Sa) of the MLAs to 52 nm and led to an image resolution up to 45.3 lp/mm.",
keywords = "Additive Manufacturing, Microfabrication, Microlens Array (MLA), Microstructure",
author = "Hsieh, {Chih Yu} and Chen, {Pin Chuan} and Chen, {Pai Shan} and Liu, {Yi Hsin}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "225--228",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
}