Annealing effect on the microstructure and optical characterization of Zn2SiO4 thin film sputtered on quartz glass

Kun Cheng Peng*, Hao Che Kao, Shiu Jen Liu, Kuei Lan Tsai, Jing Chie Lin


研究成果: 雜誌貢獻期刊論文同行評審

3 引文 斯高帕斯(Scopus)


A thin ZnO film (approximately 500nm in thickness) was deposited on quartz glass by sputtering a ZnO target (purity of 99.995%) using a radio frequency (RF) power source in the magnetron sputter. Annealing of the specimen at elevated temperatures (i.e., 1000, 1100, and 1200 °C) was conducted to clarify the effects of annealing on the microstructure and optical characteristics of the film. It was found that silicon ions diffused faster than zinc and oxygen ions in the system containing the oxide film and quartz glass substrate Zn2SiO4 whose thickness depended on the annealing temperature and duration. The surface and cross-sectional morphologies of the as-sputtered film and films annealed at various temperatures were examined by field emission scanning electron microscopy (FE-SEM) and in more detail by high-resolution transmission electron microscopy (HRTEM). Line scans obtained by scanning transmission electron microscopy (STEM) showed that the composition (wt %) of the film annealed at 1200 °C was Zn (70%), Si (20%), and O (10%). These findings indicated that ZnO completely transferred into the Zn2SiO4 film to act as a luminescence center in the case of postannealing at 1200 °C for 2 h. The amounts of ZnO transferred to Zn2SiO4 were 38.5% at 1000 °C and 31.1% at 1100 °C for the same duration. The specimens annealed at 1000, 1100, and 1200 °C showed no photoluminescence (PL) emission as determined by measurement.

期刊Japanese Journal of Applied Physics
發行號11 PART 2
出版狀態已發佈 - 2013 十一月 1

ASJC Scopus subject areas

  • 工程 (全部)
  • 物理與天文學 (全部)


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