An Observer for Enhancing Piezoelectric Force Sensing in Motion Control Systems

The piezoelectric force sensor is a type of force sensor that has several advantages over other types, including its high stiffness, small size, large dynamic range, and wide linear measurement range. However, it cannot sense static or quasi-static forces. To address this limitation, a rigid-body model and adaptive algorithm have been proposed to compensate for the lowfrequency parts of the sensor's output. The proposed scheme was tested on a linear motor-based motion stage, and the results showed that it was applicable and feasible.