An integrated accelerometer for dynamic motion systems

Yu Sheng Lu*, Hsuan Wen Wang, Sheng Hao Liu


研究成果: 雜誌貢獻期刊論文同行評審

25 引文 斯高帕斯(Scopus)


For dynamic motion systems, this paper presents a design for an integrated accelerometer that combines salient features of a MEMS capacitive accelerometer and a piezoelectric accelerometer. The piezoelectric accelerometer has a wide frequency range for measuring dynamic acceleration but is unable to sense static and quasi-static acceleration. On the other hand, the MEMS capacitive accelerometer is dc coupled and hence suitable for measuring low-frequency motion but suffers from a limited bandwidth and a low signal-to-noise ratio. The proposed accelerometer fuses these two accelerometers, being able to measure static and quasi-static acceleration and also having measurement of a wide frequency range. Experimental studies have been conducted to show feasibility and effectiveness of the proposed accelerometer.

頁(從 - 到)471-475
期刊Measurement: Journal of the International Measurement Confederation
出版狀態已發佈 - 2018 9月

ASJC Scopus subject areas

  • 儀器
  • 電氣與電子工程


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