For dynamic motion systems, this paper presents a design for an integrated accelerometer that combines salient features of a MEMS capacitive accelerometer and a piezoelectric accelerometer. The piezoelectric accelerometer has a wide frequency range for measuring dynamic acceleration but is unable to sense static and quasi-static acceleration. On the other hand, the MEMS capacitive accelerometer is dc coupled and hence suitable for measuring low-frequency motion but suffers from a limited bandwidth and a low signal-to-noise ratio. The proposed accelerometer fuses these two accelerometers, being able to measure static and quasi-static acceleration and also having measurement of a wide frequency range. Experimental studies have been conducted to show feasibility and effectiveness of the proposed accelerometer.
|頁（從 - 到）||471-475|
|期刊||Measurement: Journal of the International Measurement Confederation|
|出版狀態||已發佈 - 2018 9月|
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