Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen; Liang Yu Yen; Jin Cherng Hsu; Huang Lu Chen; Paul W. Wang; Hsiang Lin Liu

doi:10.1007/s10043-011-0057-4

Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen
, Liang Yu Yen
, Jin Cherng Hsu^*
, Huang Lu Chen
, Paul W. Wang
, Hsiang Lin Liu

^*此作品的通信作者

物理學系

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

3 引文斯高帕斯（Scopus）

摘要

Al₂O₃ thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O₂ or SF₆, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF₆ was used.

原文	英語
頁（從 - 到）	293-295
頁數	3
期刊	Optical Review
卷	18
發行號	3
DOIs	https://doi.org/10.1007/s10043-011-0057-4
出版狀態	已發佈 - 2011 5月

ASJC Scopus subject areas

原子與分子物理與光學

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10.1007/s10043-011-0057-4

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title = "Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases",

abstract = "Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20\% packing density increase and a low extinction coefficient were obtained when only SF6 was used.",

keywords = "AlO, SF, ion-assisted deposition, optical properties, packing density",

author = "Chen, \{Yu Yun\} and Yen, \{Liang Yu\} and Hsu, \{Jin Cherng\} and Chen, \{Huang Lu\} and Wang, \{Paul W.\} and Liu, \{Hsiang Lin\}",

year = "2011",

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doi = "10.1007/s10043-011-0057-4",

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AU - Chen, Yu Yun

AU - Yen, Liang Yu

AU - Hsu, Jin Cherng

AU - Chen, Huang Lu

AU - Wang, Paul W.

AU - Liu, Hsiang Lin

PY - 2011/5

Y1 - 2011/5

N2 - Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.

AB - Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.

KW - AlO

KW - SF

KW - ion-assisted deposition

KW - optical properties

KW - packing density

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Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

摘要

ASJC Scopus subject areas

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