@article{b3a775c63cc24de7ab115c878e0963c1,
title = "Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases",
abstract = "Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.",
keywords = "AlO, SF, ion-assisted deposition, optical properties, packing density",
author = "Chen, {Yu Yun} and Yen, {Liang Yu} and Hsu, {Jin Cherng} and Chen, {Huang Lu} and Wang, {Paul W.} and Liu, {Hsiang Lin}",
year = "2011",
month = may,
doi = "10.1007/s10043-011-0057-4",
language = "English",
volume = "18",
pages = "293--295",
journal = "Optical Review",
issn = "1340-6000",
publisher = "Springer-Verlag GmbH and Co. KG",
number = "3",
}