Aluminium oxide optical film fabricated with ion-assisted deposition using sulphur hexafluoride and oxygen working gases

Yu Yun Chen, Liang Yu Yen, Jin Cherng Hsu, Huang Lu Chen, Paul W. Wang, Hsiang Lin Liu

研究成果: 雜誌貢獻文章同行評審

3 引文 斯高帕斯(Scopus)

摘要

Al2O3 thin films fabricated by electron-beam evaporation with ion-assisted deposition at room temperature using O2 or SF6, or their mixture as a working gas were investigated. A significant 20% packing density increase and a low extinction coefficient were obtained when only SF6 was used.

原文英語
頁(從 - 到)293-295
頁數3
期刊Optical Review
18
發行號3
DOIs
出版狀態已發佈 - 2011 五月 1

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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