This paper proposes a new type of non-conventional electro-magnetic actuator (EMA) for a two-dimensional micro-positioning platform. It is a repulsive magnetic system consisting of a motion pad and four active coils. Motion pad is caused by the repelling force between the coils and the permanent magnets to the pad. First, exploring the characteristics of the magnetic forces between PMs and electromagnetic coils, the general two-dimensional dynamic model of this system was derived and analyzed. Next, an adaptive fuzzy controller is developed to deal with the unknown parameters to compensate the friction problem of precision positioning. Finally, extensive experimental results demonstrate satisfactory performances including regulation accuracy, tracking performance, and control stiffness for the system.
|頁（從 - 到）||110-117|
|期刊||International Journal of Fuzzy Systems|
|出版狀態||已發佈 - 2012 3月|
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