A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor

C. H. Cheng, C. C. Huang, H. H. Hsu, P. C. Chen, K. C. Chiang, Albert Chin, F. S. Yeh

研究成果: 雜誌貢獻文章

6 引文 斯高帕斯(Scopus)

摘要

In this article, we investigate the frequency-dependent voltage nonlinearity effect of high-κ Ni/SrTiO3/TaN and TaN/SrTiO 3/TaN radio-frequency (rf) metal-insulator-metal (MIM) capacitors by electrical and thermal stresses. The experimental results demonstrated that the MIM-related capacitance properties, dependence of voltage and frequency, are not only affected by intrinsic dielectric properties but also shared by extrinsic effect, which possibly originated from the oxygen vacancies or electrode polarization. The high work-function Ni electrode can prevent the frequency-dependent voltage coefficient of capacitance characteristics from deterioration under the high temperature or continued voltage-stressing environments.

原文英語
頁(從 - 到)H436-H439
期刊Electrochemical and Solid-State Letters
13
發行號12
DOIs
出版狀態已發佈 - 2010 十月 29

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

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    Cheng, C. H., Huang, C. C., Hsu, H. H., Chen, P. C., Chiang, K. C., Chin, A., & Yeh, F. S. (2010). A study on frequency-dependent voltage nonlinearity of SrTiO3 rf capacitor. Electrochemical and Solid-State Letters, 13(12), H436-H439. https://doi.org/10.1149/1.3491490