A novel micropreconcentrator employing a laminar flow patterned heater for micro gas chromatography

W. C. Tian*, T. H. Wu, C. J. Lu, W. R. Chen, H. J. Sheen

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

19 引文 斯高帕斯(Scopus)

摘要

A simple micromachined process based on one photomask is developed for a novel micropreconcentrator (PCT) used in a micro gas chromatograph (GC). Unique thick silver heating microstructures with a high surface area for microheater of PCT are fabricated by combining the microfluidic laminar flow technique and the Tollens reaction within a microchannel. Silver deposition using this laminar flow patterning technique provides a higher deposition rate and easier microfabrication compared to conventional micromachined technologies for thick metal microstructures (>200 m). An amorphous and porous carbon film that functions as an adsorbent is grown on microheaters inside the microchannel. The PCT can be heated to >300 °C rapidly by applying a constant electrical power of 1 W with a heating rate of 10 °C s 1. Four volatile organic compounds, acetone, benzene, toluene and xylene, are collected through the proposed novel PCTs and separated successfully using a 17 m long gas chromatography column. The peak widths at half height (PWHHs) of the four compounds are relatively narrow (<6 s), and the minimum PWHH of 3.75 s is obtained for acetone. The preconcentration factors are >38 000 for benzene and toluene.

原文英語
文章編號065014
期刊Journal of Micromechanics and Microengineering
22
發行號6
DOIs
出版狀態已發佈 - 2012 6月

ASJC Scopus subject areas

  • 電子、光磁材料
  • 材料力學
  • 機械工業
  • 電氣與電子工程

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