A novel hybrid process for fabricating the micro holes array

Shun Tong Chen, Tsu Sheng Luo

研究成果: 會議貢獻類型會議論文同行評審

摘要

A low cost hybrid fabrication process called as 4 precision filled wax metal deposition' is developed and proposed in this study. The micro EDM hole drilling is used first to perforate micro holes through a piece of substrate ( SUS304), which is cylindrical holes in shape and has a specula surface finish. Two miniature devices including the extrusion die and the deposition mould are designed so that extrude the sacrificial material (i. e. wax) and then deposit the metal. The temperature of the extruded oily wax is determined to accurately obtain a good micro wax pillar mould and formed onto the specula SUS304 substrate, resulting in a precision cylindrical shape array. The precision metal deposition is then conducted to deposit a thick nickel metal layer onto the substrate, and the wax mould is completely removed by heated water to reveal the final product - A perforated micro holes array. The finished micro holes have an average hole diameter of 126 pm without taper and burrs, and demonstrate ideal geometric accuracy.

原文英語
頁面501-506
頁數6
出版狀態已發佈 - 2010 一月 1
事件16th International Symposium on Electromachining, ISEM 2010 - Shanghai, 中国
持續時間: 2010 四月 192010 四月 23

其他

其他16th International Symposium on Electromachining, ISEM 2010
國家中国
城市Shanghai
期間2010/04/192010/04/23

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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