A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper

Chih Hsien Lin*, Shao Kung Hung, Mei-Yung Chen, Shan Tsung Li, Li Chen Fu

*此作品的通信作者

研究成果: 書貢獻/報告類型會議論文篇章

12 引文 斯高帕斯(Scopus)

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Engineering & Materials Science