A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper

Chih Hsien Lin, Shao Kung Hung, Mei-Yung Chen, Shan Tsung Li, Li Chen Fu

研究成果: 書貢獻/報告類型會議貢獻

11 引文 斯高帕斯(Scopus)

摘要

This paper proposes a novel planar electromagnetic-actuated positioning stage. The stage is suspended by the monolithic parallel flexure mechanism, which motion comes from the deformation of the flexure. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for 3-DOF motions. In order to suppress the vibration of the flexure suspension mechanism, an eddy current damper is designed and integrated with the electromagnetic actuator. The non-contact damper is more advanced than the contact damper used in our previous researches. The design traveling range is 3mm × 3mm in planar motion. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.

原文英語
主出版物標題2008 International Conference on Control, Automation and Systems, ICCAS 2008
頁面771-776
頁數6
DOIs
出版狀態已發佈 - 2008 十二月 1
事件2008 International Conference on Control, Automation and Systems, ICCAS 2008 - Seoul, 大韓民國
持續時間: 2008 十月 142008 十月 17

出版系列

名字2008 International Conference on Control, Automation and Systems, ICCAS 2008

其他

其他2008 International Conference on Control, Automation and Systems, ICCAS 2008
國家大韓民國
城市Seoul
期間08/10/1408/10/17

    指紋

ASJC Scopus subject areas

  • Control and Systems Engineering

引用此

Lin, C. H., Hung, S. K., Chen, M-Y., Li, S. T., & Fu, L. C. (2008). A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper. 於 2008 International Conference on Control, Automation and Systems, ICCAS 2008 (頁 771-776). [4694602] (2008 International Conference on Control, Automation and Systems, ICCAS 2008). https://doi.org/10.1109/ICCAS.2008.4694602