A new mechanism design of electro-magnetic actuator for a micro-positioner

Mei Yung Chen*, Huan Wen Tzeng, Shao Kang Hung

*此作品的通信作者

研究成果: 雜誌貢獻期刊論文同行評審

20 引文 斯高帕斯(Scopus)

摘要

This paper proposes a new type of non-conventional electro-magnetic actuator (EMA) for micro-positioning. It is a repulsive magnetic system consisting of a motion pad and two active coils. The motion of the pad is caused by the repelling force between the coils and the permanent magnets on the pad. First, the dynamic model is derived and analyzed. Next, an adaptive sliding mode controller is developed to deal with the unknown parameters with the objective of precision positioning. The experimental results demonstrate satisfactory performances including regulation accuracy and control stiffness for the system.

原文英語
頁(從 - 到)41-48
頁數8
期刊ISA Transactions
46
發行號1
DOIs
出版狀態已發佈 - 2007 二月

ASJC Scopus subject areas

  • 儀器
  • 電腦科學應用
  • 電氣與電子工程
  • 應用數學

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