A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism

Mei Yung Chen, Hsuan Han Huang, Shao Kang Hung

研究成果: 雜誌貢獻文章同行評審

58 引文 斯高帕斯(Scopus)

摘要

In this paper, a novel XY -dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive slidingmode controller; and 4) to perform extensive experiments to test the realistic performance.

原文英語
頁(從 - 到)96-106
頁數11
期刊IEEE Transactions on Industrial Electronics
57
發行號1
DOIs
出版狀態已發佈 - 2010 一月

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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