A complementary metal-oxide-semiconductor (CMOS)-based gas sensor platform using a commercially available 0.35 μm CMOS process and the microelectromechanical systems (MEMS) post process was developed in this work. An n-type polysilicon microheater with ∼2 kΩ and a metal thermometer with ∼1 kΩ were integrated within this platform to provide a temperature programming for sensing film preparations and sensor characterizations. After the standard CMOS process, a freestanding micro hotplate was fabricated via an isotropic silicon dry etching. The rapid thermal response (<1 s) and an uniform heating distribution (100°C, standard deviation of 1°C) of this sensor platform were demonstrated. The sensing material was prepared with the mixing of commercially available single-walled carbon nanotubes (SWCNTs) and an organic solvent. Our sensors were tested with three compounds (Octane, Butanol, and Butylacetate) and the good linearity and fast response time (<5 s) were demonstrated. The great sensor sensitivities of the three compounds were obtained (Octane: 0.329 ppm/ppm, Butanol: 0.522 ppm/ppm, and Butylacetate: 0.683 ppm/ppm) at a high concentration range (>1K ppm) and could be used to enhance the specificity of the SWCNTs-based gas sensor.
|主出版物標題||IEEE Sensors 2011 Conference, SENSORS 2011|
|出版狀態||已發佈 - 2011|
|事件||10th IEEE SENSORS Conference 2011, SENSORS 2011 - Limerick, 愛爾蘭|
持續時間: 2011 十月 28 → 2011 十月 31
|其他||10th IEEE SENSORS Conference 2011, SENSORS 2011|
|期間||2011/10/28 → 2011/10/31|
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