奈米級無摻雜型鐵電負電容材料與元件關鍵製程技術開發

Physics & Astronomy

1. capacitance 100%
2. field effect transistors 70%
3. leakage 59%
4. scaling 49%
5. transistors 42%
6. industries 29%
7. switches 29%
8. promotion 22%
9. very large scale integration 21%
10. ferroelectricity 20%
11. surface treatment 18%
12. logic 17%
13. passivity 16%
14. CMOS 16%
15. crystallinity 15%
16. thermal stability 15%
17. platforms 15%
18. film thickness 14%
19. hysteresis 13%
20. engineering 13%
21. requirements 12%
22. fabrication 10%
23. defects 9%
24. electric potential 9%
25. thin films 9%
26. atoms 9%
27. performance 7%