Young's modulus of high aspect ratio Si3N4 nano-thickness membrane

Ping Hei Chen; Cheng Hao Yang; Chien Ying Tsai; Tien Li Chang; Wei Cheng Hsu; Ta Chih Chen

doi:10.1109/NANO.2007.4601367

Young's modulus of high aspect ratio Si₃N₄ nano-thickness membrane

Ping Hei Chen^*, Cheng Hao Yang, Chien Ying Tsai, Tien Li Chang, Wei Cheng Hsu, Ta Chih Chen

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness membrane due to its nano-scale dimension. Currently, many potential applications for the nanoscale structures are not really practical because their mechanical properties have not been established. In this study, a suspended high aspect ratio silicon nitride nano-thickness membrane is fabricated by using silicon micro-machining. The membrane has a thickness of 30 nm and an area of 4 mm by 7 mm, as shown in Fig.1. Young's modulus of the silicon nitride nano-thickness membrane is determined from the deflection of the suspended membrane, which is resulted from the weight of membrane itself.

Original language	English
Title of host publication	2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
Pages	1341-1344
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2007.4601367
Publication status	Published - 2007
Externally published	Yes
Event	2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007 - Hong Kong, China Duration: 2007 Aug 2 → 2007 Aug 5

Publication series

Name	2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

Other

Other	2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007
Country/Territory	China
City	Hong Kong
Period	2007/08/02 → 2007/08/05

Keywords

Nano membrane
Silicon nitride
Young's modulus

ASJC Scopus subject areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/NANO.2007.4601367

Cite this

Chen, P. H., Yang, C. H., Tsai, C. Y., Chang, T. L., Hsu, W. C., & Chen, T. C. (2007). Young's modulus of high aspect ratio Si₃N₄ nano-thickness membrane. In 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings (pp. 1341-1344). Article 4601367 (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings). https://doi.org/10.1109/NANO.2007.4601367

Young's modulus of high aspect ratio Si₃N₄ nano-thickness membrane. / Chen, Ping Hei; Yang, Cheng Hao; Tsai, Chien Ying et al.
2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings. 2007. p. 1341-1344 4601367 (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chen, PH, Yang, CH, Tsai, CY, Chang, TL, Hsu, WC & Chen, TC 2007, Young's modulus of high aspect ratio Si₃N₄ nano-thickness membrane. in 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings., 4601367, 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings, pp. 1341-1344, 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Hong Kong, China, 2007/08/02. https://doi.org/10.1109/NANO.2007.4601367

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