Young's modulus of high aspect ratio Si3N4 nano-thickness membrane

Ping Hei Chen, Cheng Hao Yang, Chien Ying Tsai, Tien Li Chang, Wei Cheng Hsu, Ta Chih Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Fingerprint Dive into the research topics of 'Young's modulus of high aspect ratio Si3N4 nano-thickness membrane'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science