Young's modulus of high aspect ratio Si3N4 nano-thickness membrane

Ping Hei Chen, Cheng Hao Yang, Chien Ying Tsai, Tien-Li Chang, Wei Cheng Hsu, Ta Chih Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The physical properties of nano-thickness membrane are known to be different from those of bulk material. However, it requires a novel approach to measure the physical properties of nano-thickness membrane due to its nano-scale dimension. Currently, many potential applications for the nanoscale structures are not really practical because their mechanical properties have not been established. In this study, a suspended high aspect ratio silicon nitride nano-thickness membrane is fabricated by using silicon micro-machining. The membrane has a thickness of 30 nm and an area of 4 mm by 7 mm, as shown in Fig.1. Young's modulus of the silicon nitride nano-thickness membrane is determined from the deflection of the suspended membrane, which is resulted from the weight of membrane itself.

Original languageEnglish
Title of host publication2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
Pages1341-1344
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007 - Hong Kong, China
Duration: 2007 Aug 22007 Aug 5

Publication series

Name2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

Other

Other2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007
CountryChina
CityHong Kong
Period07/8/207/8/5

Fingerprint

high aspect ratio
Aspect ratio
modulus of elasticity
Elastic moduli
membranes
Membranes
Silicon nitride
silicon nitrides
Physical properties
physical properties
machining
deflection
Machining
mechanical properties
Silicon
Mechanical properties
silicon

Keywords

  • Nano membrane
  • Silicon nitride
  • Young's modulus

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Chen, P. H., Yang, C. H., Tsai, C. Y., Chang, T-L., Hsu, W. C., & Chen, T. C. (2007). Young's modulus of high aspect ratio Si3N4 nano-thickness membrane. In 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings (pp. 1341-1344). [4601367] (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings). https://doi.org/10.1109/NANO.2007.4601367

Young's modulus of high aspect ratio Si3N4 nano-thickness membrane. / Chen, Ping Hei; Yang, Cheng Hao; Tsai, Chien Ying; Chang, Tien-Li; Hsu, Wei Cheng; Chen, Ta Chih.

2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings. 2007. p. 1341-1344 4601367 (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, PH, Yang, CH, Tsai, CY, Chang, T-L, Hsu, WC & Chen, TC 2007, Young's modulus of high aspect ratio Si3N4 nano-thickness membrane. in 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings., 4601367, 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings, pp. 1341-1344, 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Hong Kong, China, 07/8/2. https://doi.org/10.1109/NANO.2007.4601367
Chen PH, Yang CH, Tsai CY, Chang T-L, Hsu WC, Chen TC. Young's modulus of high aspect ratio Si3N4 nano-thickness membrane. In 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings. 2007. p. 1341-1344. 4601367. (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings). https://doi.org/10.1109/NANO.2007.4601367
Chen, Ping Hei ; Yang, Cheng Hao ; Tsai, Chien Ying ; Chang, Tien-Li ; Hsu, Wei Cheng ; Chen, Ta Chih. / Young's modulus of high aspect ratio Si3N4 nano-thickness membrane. 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings. 2007. pp. 1341-1344 (2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings).
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