X-ray absorption spectroscopy approaches to electronic state and coordination type of lithium phosphorus oxynitride thin films

Tai Feng Hung, Hong Chang Wong, Yi Chun Tu, Chin Chang Shen, Ru Shi Liu, Jin Ming Chen, Shu Fen Hu

Research output: Contribution to journalArticle

Abstract

In this study, lithium phosphorus oxynitride (LiPON) thin films were deposited by radio frequency (r.f.) magnetron sputtering of a lithium phosphate (Li 3PO 4) target with various powers. The crystal structure, morphology, chemical environment, ionic conductivity, electronic state and coordination type were sequentially characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy, electrochemical impedance spectroscopy and X-ray absorption spectroscopy, respectively. As the results, the optimal ionic conductivity was achieved by the r.f. power of 75 W. Furthermore, the P-N valence states of hybrid orbitals were increased with increasing the nitrogen amounts.

Original languageEnglish
Pages (from-to)1270-1274
Number of pages5
JournalJournal of the Chinese Chemical Society
Volume59
Issue number10
DOIs
Publication statusPublished - 2012 Oct 1

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X ray absorption spectroscopy
Electronic states
Ionic conductivity
Lithium
Phosphorus
Thin films
Electrochemical impedance spectroscopy
Magnetron sputtering
Electron microscopes
Nitrogen
X ray photoelectron spectroscopy
Crystal structure
Phosphates
Scanning
X ray diffraction

Keywords

  • Electronic state
  • Ionic conductivity
  • Lithium phosphorous oxynitride
  • X-ray absorption near edge structure
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Chemistry(all)

Cite this

X-ray absorption spectroscopy approaches to electronic state and coordination type of lithium phosphorus oxynitride thin films. / Hung, Tai Feng; Wong, Hong Chang; Tu, Yi Chun; Shen, Chin Chang; Liu, Ru Shi; Chen, Jin Ming; Hu, Shu Fen.

In: Journal of the Chinese Chemical Society, Vol. 59, No. 10, 01.10.2012, p. 1270-1274.

Research output: Contribution to journalArticle

Hung, Tai Feng ; Wong, Hong Chang ; Tu, Yi Chun ; Shen, Chin Chang ; Liu, Ru Shi ; Chen, Jin Ming ; Hu, Shu Fen. / X-ray absorption spectroscopy approaches to electronic state and coordination type of lithium phosphorus oxynitride thin films. In: Journal of the Chinese Chemical Society. 2012 ; Vol. 59, No. 10. pp. 1270-1274.
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AU - Hung, Tai Feng

AU - Wong, Hong Chang

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AU - Liu, Ru Shi

AU - Chen, Jin Ming

AU - Hu, Shu Fen

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