X-ray absorption spectroscopy approaches to electronic state and coordination type of lithium phosphorus oxynitride thin films

Tai Feng Hung, Hong Chang Wong, Yi Chun Tu, Chin Chang Shen, Ru Shi Liu, Jin Ming Chen, Shu Fen Hu

Research output: Contribution to journalArticle


In this study, lithium phosphorus oxynitride (LiPON) thin films were deposited by radio frequency (r.f.) magnetron sputtering of a lithium phosphate (Li 3PO 4) target with various powers. The crystal structure, morphology, chemical environment, ionic conductivity, electronic state and coordination type were sequentially characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy, electrochemical impedance spectroscopy and X-ray absorption spectroscopy, respectively. As the results, the optimal ionic conductivity was achieved by the r.f. power of 75 W. Furthermore, the P-N valence states of hybrid orbitals were increased with increasing the nitrogen amounts.

Original languageEnglish
Pages (from-to)1270-1274
Number of pages5
JournalJournal of the Chinese Chemical Society
Issue number10
Publication statusPublished - 2012 Oct 1



  • Electronic state
  • Ionic conductivity
  • Lithium phosphorous oxynitride
  • X-ray absorption near edge structure
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Chemistry(all)

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