In this study, lithium phosphorus oxynitride (LiPON) thin films were deposited by radio frequency (r.f.) magnetron sputtering of a lithium phosphate (Li 3PO 4) target with various powers. The crystal structure, morphology, chemical environment, ionic conductivity, electronic state and coordination type were sequentially characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy, electrochemical impedance spectroscopy and X-ray absorption spectroscopy, respectively. As the results, the optimal ionic conductivity was achieved by the r.f. power of 75 W. Furthermore, the P-N valence states of hybrid orbitals were increased with increasing the nitrogen amounts.
- Electronic state
- Ionic conductivity
- Lithium phosphorous oxynitride
- X-ray absorption near edge structure
- X-ray photoelectron spectroscopy
ASJC Scopus subject areas