Abstract
It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.
| Original language | English |
|---|---|
| Title of host publication | Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI |
| Volume | 6463 |
| DOIs | |
| Publication status | Published - 2007 Apr 30 |
| Event | Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - San Jose, CA, United States Duration: 2007 Jan 23 → 2007 Jan 24 |
Other
| Other | Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI |
|---|---|
| Country | United States |
| City | San Jose, CA |
| Period | 07/1/23 → 07/1/24 |
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Keywords
- 3-D profile measurement
- Michelson interferometer
- Spatial coherence
- White-light interferometry
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
White liglit interferometric profile measurement system using spectral coherence. / Chang, Gao Wei; Lin, Yu Hsuan; Yeh, Zong Mu.
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. Vol. 6463 2007. 64630I.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - White liglit interferometric profile measurement system using spectral coherence
AU - Chang, Gao Wei
AU - Lin, Yu Hsuan
AU - Yeh, Zong Mu
PY - 2007/4/30
Y1 - 2007/4/30
N2 - It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.
AB - It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.
KW - 3-D profile measurement
KW - Michelson interferometer
KW - Spatial coherence
KW - White-light interferometry
UR - http://www.scopus.com/inward/record.url?scp=34247368009&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247368009&partnerID=8YFLogxK
U2 - 10.1117/12.700003
DO - 10.1117/12.700003
M3 - Conference contribution
AN - SCOPUS:34247368009
SN - 0819465763
SN - 9780819465764
VL - 6463
BT - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
ER -