White liglit interferometric profile measurement system using spectral coherence

Gao Wei Chang, Yu Hsuan Lin, Zong Mu Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Volume6463
DOIs
Publication statusPublished - 2007 Apr 30
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - San Jose, CA, United States
Duration: 2007 Jan 232007 Jan 24

Other

OtherReliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
CountryUnited States
CitySan Jose, CA
Period07/1/2307/1/24

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Keywords

  • 3-D profile measurement
  • Michelson interferometer
  • Spatial coherence
  • White-light interferometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Chang, G. W., Lin, Y. H., & Yeh, Z. M. (2007). White liglit interferometric profile measurement system using spectral coherence. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI (Vol. 6463). [64630I] https://doi.org/10.1117/12.700003