Volatile organic solvents sensing using silicon nanowires array fabricated by spontaneous electrochemical reaction

Shih Yi Chien, Hui Ling Sung, Chin Pao Cheng, Yu Man Shang, Shun Nan Lin, Jia Hao You

Research output: Contribution to journalArticle


In order to prevent overexposure to volatile organic solvents (VOCs), a simple sensing device with high sensitivity is needed in the common workplace. Meanwhile, silicon nanowires carrying the high surface-bulk ratio as a unique characteristic could be used for VOCs sensing. This study utilised spontaneous electrochemical reaction, which involves etching of silicon wafer in a silver nitrate and hydrofluoric acid based solution, to modify etching times for silicon nanowires fabrication. This research discovered that the length of nanowire increased and VOCs sensing sensitivity improved as the etching time increased. Furthermore, diethyl ether had the optimal performance on the effect of silicon nanowires array on VOCs sensing. The study also discussed the effect of VOCs molecules and electron distribution on silicon nanowires surface, to further investigate the impact on sensing sensitivity.

Original languageEnglish
Pages (from-to)1119-1128
Number of pages10
JournalInternational Journal of Nanotechnology
Issue number12
Publication statusPublished - 2014 Jan 1



  • Silicon nanowires
  • Spontaneous electrochemical reaction
  • Volatile organic solvent sensing

ASJC Scopus subject areas

  • Bioengineering
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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