TY - GEN
T1 - Volatile organic compounds sensor with stacked interdigitated electrodes coated with monolayer-protected gold nanoclusters
AU - Chang, C. Y.
AU - Kuo, C. Y.
AU - Huang, P. K.
AU - Tian, W. C.
AU - Lu, C. J.
PY - 2013
Y1 - 2013
N2 - In this paper we present a complementary metal-oxide-semiconductor (CMOS) based volatile organic compounds (VOCs) sensor featured by stacked interdigitated electrodes and a polysilicon microheater. N-octanethiol functionalized gold nanoparticles (Au-C8), a type of monolayer-protected gold nanoclusters (MPCs), were employed as sensing material. The design of the sensor and the fabrication utilizing a commercial CMOS process were demonstrated. MPCs were coated by airbrushing MPCs suspension and simultaneous heating was provided by the on-chip microheater. The sensor performance was tested using octane, toluene and butanol. The responses were fast, and the sensitivity, defined as the ratio of resistance change rate (ppm) to gas concentration (ppm), was 33.1, 27.6 and 21.9 ppm/ppm for octane, toluene and butanol, respectively. Being a universal detector implicated its applicability to a gas chromatograph.
AB - In this paper we present a complementary metal-oxide-semiconductor (CMOS) based volatile organic compounds (VOCs) sensor featured by stacked interdigitated electrodes and a polysilicon microheater. N-octanethiol functionalized gold nanoparticles (Au-C8), a type of monolayer-protected gold nanoclusters (MPCs), were employed as sensing material. The design of the sensor and the fabrication utilizing a commercial CMOS process were demonstrated. MPCs were coated by airbrushing MPCs suspension and simultaneous heating was provided by the on-chip microheater. The sensor performance was tested using octane, toluene and butanol. The responses were fast, and the sensitivity, defined as the ratio of resistance change rate (ppm) to gas concentration (ppm), was 33.1, 27.6 and 21.9 ppm/ppm for octane, toluene and butanol, respectively. Being a universal detector implicated its applicability to a gas chromatograph.
KW - Chemical sensor
KW - complementary metal-oxide-semiconductor (CMOS)
KW - monolayer-protected gold nanoclusters (MPCs)
KW - volatile organic compounds (VOCs)
UR - http://www.scopus.com/inward/record.url?scp=84891720710&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891720710&partnerID=8YFLogxK
U2 - 10.1109/Transducers.2013.6626981
DO - 10.1109/Transducers.2013.6626981
M3 - Conference contribution
AN - SCOPUS:84891720710
SN - 9781467359818
T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
SP - 1170
EP - 1173
BT - 2013 Transducers and Eurosensors XXVII
T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Y2 - 16 June 2013 through 20 June 2013
ER -