Volatile organic compounds sensor with stacked interdigitated electrodes coated with monolayer-protected gold nanoclusters

C. Y. Chang, C. Y. Kuo, P. K. Huang, W. C. Tian, C. J. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper we present a complementary metal-oxide-semiconductor (CMOS) based volatile organic compounds (VOCs) sensor featured by stacked interdigitated electrodes and a polysilicon microheater. N-octanethiol functionalized gold nanoparticles (Au-C8), a type of monolayer-protected gold nanoclusters (MPCs), were employed as sensing material. The design of the sensor and the fabrication utilizing a commercial CMOS process were demonstrated. MPCs were coated by airbrushing MPCs suspension and simultaneous heating was provided by the on-chip microheater. The sensor performance was tested using octane, toluene and butanol. The responses were fast, and the sensitivity, defined as the ratio of resistance change rate (ppm) to gas concentration (ppm), was 33.1, 27.6 and 21.9 ppm/ppm for octane, toluene and butanol, respectively. Being a universal detector implicated its applicability to a gas chromatograph.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages1170-1173
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: 2013 Jun 162013 Jun 20

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period13/6/1613/6/20

Keywords

  • Chemical sensor
  • complementary metal-oxide-semiconductor (CMOS)
  • monolayer-protected gold nanoclusters (MPCs)
  • volatile organic compounds (VOCs)

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Chang, C. Y., Kuo, C. Y., Huang, P. K., Tian, W. C., & Lu, C. J. (2013). Volatile organic compounds sensor with stacked interdigitated electrodes coated with monolayer-protected gold nanoclusters. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1170-1173). [6626981] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626981