Visualizing Ferroelectric Uniformity of Hf1- xZr xO2Films Using X-ray Mapping

Shu Jui Chang, Chih Yu Teng, Yi Jan Lin, Tsung Mu Wu, Min Hung Lee, Bi Hsuan Lin, Mau Tsu Tang, Tai Sing Wu, Chenming Hu, Ethan Ying Tsan Tang*, Yuan Chieh Tseng*

*Corresponding author for this work

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13 Citations (Scopus)

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Physics

Material Science