Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

Ting Hsuan Huang; Pei Yi Li; Jin Bin Yang; Te Yao Liu; Mei Hsin Chen; Po Tsun Liu; Hsin Fei Meng; Chia Jung Lu; Olivier Soppera; Ping Hung Yeh; Hsiao Wen Zan

doi:10.1016/j.snb.2021.131222

Vertical channel metal-oxide clusters as sensitive NO₂ sensor with modulated response at room temperature

Ting Hsuan Huang, Pei Yi Li, Jin Bin Yang, Te Yao Liu, Mei Hsin Chen, Po Tsun Liu, Hsin Fei Meng, Chia Jung Lu, Olivier Soppera, Ping Hung Yeh^*, Hsiao Wen Zan^*

^*Corresponding author for this work

Department of Chemistry

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

We proposed room-temperature-operated sensitive NO₂ sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

Original language	English
Article number	131222
Journal	Sensors and Actuators B: Chemical
Volume	354
DOIs	https://doi.org/10.1016/j.snb.2021.131222
Publication status	Published - 2022 Mar 1

Keywords

Gas sensor
Hydroxyl group
Metal oxide cluster
Sol-gel

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1016/j.snb.2021.131222

Cite this

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title = "Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature",

abstract = "We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.",

keywords = "Gas sensor, Hydroxyl group, Metal oxide cluster, Sol-gel",

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year = "2022",

month = mar,

day = "1",

doi = "10.1016/j.snb.2021.131222",

language = "English",

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T1 - Vertical channel metal-oxide clusters as sensitive NO2 sensor with modulated response at room temperature

AU - Huang, Ting Hsuan

AU - Li, Pei Yi

AU - Yang, Jin Bin

AU - Liu, Te Yao

AU - Chen, Mei Hsin

AU - Liu, Po Tsun

AU - Meng, Hsin Fei

AU - Lu, Chia Jung

AU - Soppera, Olivier

AU - Yeh, Ping Hung

AU - Zan, Hsiao Wen

PY - 2022/3/1

Y1 - 2022/3/1

N2 - We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

AB - We proposed room-temperature-operated sensitive NO2 sensors by using a sol-gel thin-film device with a vertical channel structure. With the vertical channel, the low conductivity metal oxide clusters delivered large enough current. We hence noticed the unique sensing modulation characteristics, which were not observed in conventional lateral channel metal oxide devices, by simply adjusting the film composition. With a systematic study by tuning the composition and investigating the surface property, we proposed the level of hydroxyl group as the dominant factor to influence the sensitivity. Finally, the good-enough selectivity, repeatability, and shelf lifetime were successfully demonstrated.

KW - Gas sensor

KW - Hydroxyl group

KW - Metal oxide cluster

KW - Sol-gel

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