Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots

Chien Hung Ho, Kan Ping Chin, Chii Rong Yang, Hsien Ming Wu, Soon Lin Chen

Research output: Contribution to journalArticlepeer-review

63 Citations (Scopus)

Fingerprint Dive into the research topics of 'Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy