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Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots
Chien Hung Ho*, Kan Ping Chin, Chii Rong Yang, Hsien Ming Wu, Soon Lin Chen
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
69
Citations
(Scopus)