Threading dislocation induced low frequency noise in strained-Si nMOSFETs

W. C. Hua, M. H. Lee, P. S. Chen, M. J. Tsai, Chee W. Liu

    Research output: Contribution to journalArticlepeer-review

    32 Citations (Scopus)

    Abstract

    The correlations between the threading dislocations and the low-frequency noise characteristics of the n-type strained-Si field-effect transistors are studied using the devices with different sizes. The device-area-dependent SVG (power spectral density of the gate referred voltage noise) ratio of the strained-Si devices over the control Si devices obtained form geometric average can be understood by the modified carrier number fluctuation model with excess traps from the Poisson distributed threading dislocations. The equivalent trap number per threading dislocation extracted from the area-dependent SVG ratios is ∼85 for the strained-Si devices, and which results in ∼4.2X degradation of the SVG for the strained-Si device with the device area of 625 μm2.

    Original languageEnglish
    Pages (from-to)667-669
    Number of pages3
    JournalIEEE Electron Device Letters
    Volume26
    Issue number9
    DOIs
    Publication statusPublished - 2005 Sep 1

    Keywords

    • Flicker noise
    • MOSFET
    • Strained-Si
    • Threading dislocation

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering

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