Thermoelectric properties of Sb 2Te 3 thin films by electron beam evaporation

Chang Ho, Mu Jung Kao, Cheng Hao Peng, Chin Guo Kuo, Kuohsiu David Huang

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This study applies the thermoelectric grains of Sb 2Te 3 on conductive glass to evaporate Sb 2Te 3 thin films by the electron beam evaporation method. Through experimental tests with different evaporation process parameters and film annealing conditions, thin films with better Seebeck coefficient, resistivity (ρ) and power fact (PF) can be obtained. Experimental results show that when thin films are annealed, their defects can be decreased accordingly, and carrier mobility can be enhanced to further elevate the conductivity of thin films. When the substrate temperature is set at 200 °C to fabricate Sb 2Te 3 thin films by the evaporation process and by annealing at 220 °C for 60 minutes, the Seebeck coefficient of Sb 2Te 3 thin films increase from 87.6 μV/K to 177.7 μV/K; resistivity falls from 6.21 mω-cm to 2.53 mω-cm and PF can achieve the maximum value of 1.24 10- 3 W/K 2 m. Finally, this study attempts to add indium (In) to Sb 2Te 3 thin films. Indium has been successfully fabricated In 3SbTe 2 thin films. This study also analyzes the effects of In on the thermoelectric properties of In 3SbTe 2 thin films.

Original languageEnglish
Pages (from-to)7491-7494
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume11
Issue number8
DOIs
Publication statusPublished - 2011 Aug 1

Fingerprint

Indium
Electron beams
Evaporation
evaporation
electron beams
Electrons
Thin films
thin films
indium
Seebeck coefficient
Seebeck effect
Glass
Annealing
electrical resistivity
annealing
Carrier mobility
Temperature
carrier mobility
conductivity
Defects

Keywords

  • Electron beam evaporation
  • Resistivity
  • Seebeck coefficient
  • ZT value

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Thermoelectric properties of Sb 2Te 3 thin films by electron beam evaporation. / Ho, Chang; Kao, Mu Jung; Peng, Cheng Hao; Kuo, Chin Guo; Huang, Kuohsiu David.

In: Journal of Nanoscience and Nanotechnology, Vol. 11, No. 8, 01.08.2011, p. 7491-7494.

Research output: Contribution to journalArticle

Ho, Chang ; Kao, Mu Jung ; Peng, Cheng Hao ; Kuo, Chin Guo ; Huang, Kuohsiu David. / Thermoelectric properties of Sb 2Te 3 thin films by electron beam evaporation. In: Journal of Nanoscience and Nanotechnology. 2011 ; Vol. 11, No. 8. pp. 7491-7494.
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