The straightforward fabrication of thin silicide layers at low temperatures by employing the molecular-incident reaction effect
- Cheng Hsun Tony Chang
- , Yu Ting Chow
- , Pei Cheng Jiang
- , Tsu Yi Fu
- , Jyh Shen Tsay*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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